Delta-X multifunctional X-ray diffractometer/reflectometer

Can meet the comprehensive testing needs of different material systems in scientific research institutes and technology development centers.

Product Introduction

The Delta-X multifunctional X-ray diffraction device designed by Jordan Valley Company can be flexibly applied in environments such as materials science research, process development, and production quality control. The Delta-X diffractometer can flexibly switch between conventional diffraction mode, high-resolution diffraction mode, and X-ray reflection mode. The optical components of the light source stage and detection stage of the diffractometer can be fully automated and controlled, and a horizontal sample stage is adopted.

The switching of optical configuration is completely completed by the computer under menu based program control, without the need for manual operation. Automated switching and alignment do not require specialized personnel or operating equipment, and ensure that the appropriate optical alignment state can be achieved with each switching.

Conventional sample measurements can be partially or even fully automated using a Delta-X diffractometer. Automated measurement programs can be customized according to customer needs. Complete manual mode can also be used to operate the diffractometer in order to develop new measurement methods and study new material systems.

Data analysis or fitting can be used as part of a measurement program, which can achieve complete automation, or data analysis can be performed separately according to needs. Taking the semiconductor production line as an example, according to the needs of the production line, RADS and REFS fitting software can be run in automated mode, allowing the equipment to automatically complete routine data analysis without user interference, and directly complete data fitting and result output. RADS and REFS can also be installed separately for more detailed data analysis.

Product Features

·Automated sample alignment, testing, and data analysis

·Customers can set the degree of automation for their own measurements

·300mm Euler Cradle bracket design, high-precision sample positioning and scanning

·A 300mm chip is placed horizontally and can be fully mapped

·The Chi axis tilt range of 100 ° and the Phi axis rotation space of unlimited range can achieve pole figure and residual stress testing

·Intelligent optical configuration switching and collimation. Automatically select optical configuration and implement optical collimation according to measurement needs

·Powerful industrial grade equipment control software and data analysis software

·High resolution angle measuring instrument to ensure precise and accurate measurements

·High intensity light source stage design and optical component combination for rapid measurement

·Extensive testing techniques and measurement parameters from multiple perspectives

·Designed and manufactured by experts with over 30 years of experience in high-resolution X-ray diffraction, with global customer experience.

Product advantages

1. Automated control optical system

The input beam of the Delta X-ray diffractometer includes multiple standard optical configuration modes, making the optical configuration highly flexible and easy to operate. Reference crystals can be selected based on the material type of the measured sample.

2. Sample stand

The Euler ring support design of the Delta X-ray diffractometer allows for the placement of single or multiple chips or samples, and provides precise movement control with a wide range and high reproducibility for multiple rotational axes.

·Can accommodate chips with a diameter of 300mm or multiple small-sized chips and samples

·Edge to edge full chip measurement (without edge measurement distortion)

·Special environmental sample tables can be optionally selected, such as high temperature, vacuum, etc.

3. Detection platform

·Flashing high-performance point detector significantly improves response characteristics

·Excellent performance line detector (optional accessory)

4. Automated Robot Arm Accessories

Optional fully automated robotic arm for fully automated loading, unloading, and measurement of chips with a diameter ≤ 300mm.

5. System control and data collection

The Delta X-ray diffractometer can operate in different modes, including menu style fully automated measurement, manual collimation and scanning of various axes, etc.

·Create measurement menus using flexible and convenient guides

·Automatically generate analysis reports, providing real-time information and alerts

6. Professional user functionality

Professional users can fully utilize the additional professional features of the Delta X-ray diffractometer. The control software allows users to use all operating modes, from fully automatic operation to fully manual alignment and measurement.

·Manual/Automated Alignment Program Settings

·Can achieve professional scanning mode in any direction

·Powerful program scripts

Application examples

·High resolution X-ray diffraction and relaxation

Materials: Single crystal substrate materials (such as Si, GaAs, InP, GaN) and epitaxial layer materials, including multi-layer epitaxial film structures

Parameters: Epitaxial layer thickness, composition, relaxation degree, lattice strain, chip uniformity, lattice mismatch, doping concentration, substrate skew angle, epitaxial tilt angle.

·Triaxial X-ray diffraction and reciprocal space map

Materials: Single crystal substrate materials (such as Si, GaAs, InP, GaN) and epitaxial layer materials, including multi-layer epitaxial film structures

Parameters: Epitaxial layer thickness, composition, relaxation degree, lattice strain, chip uniformity, lattice mismatch, doping concentration, substrate skew angle, epitaxial tilt angle.

·Example of High Resolution X-ray Diffraction (HRXRD) Data

-GaN based quantum well structure

-Growth of III-V group materials on silicon substrates

·X-ray Reflection (XRR)

Material type: film

Parameters: film thickness, density, roughness

Scanning method: Omega-2Theta scan, Omega scan, 2Theta scan

·X-ray diffraction (XRD)

Materials: Measurement of polycrystalline materials, nanomaterials, polycrystalline thin films, etc. For ultra-thin layer materials and thin film materials with nanoscale thickness, grazing incidence diffraction can be used.

Parameters: phase structure, texture, grain size, particle size, cell analysis, crystallinity analysis, residual stress measurement.

·X-ray diffraction (XRD) of polycrystalline thin films

Materials: Measurement of polycrystalline materials, nanomaterials, polycrystalline thin films, etc. For ultra-thin layer materials and thin film materials with nanoscale thickness, grazing incidence diffraction can be used.

Parameters: phase structure, lattice constant, grain size

·Grazing incidence X-ray diffraction (GI-XDR) of polycrystalline thin films

Materials: Measurement of polycrystalline materials, nanomaterials, polycrystalline thin films, etc. For ultra-thin layer materials and thin film materials with nanoscale thickness, grazing incidence diffraction can be used.

Parameters: phase structure, texture, crystallinity

Scanning mode: 2Theta scan (GI-XDR)

·Polar diagram of polycrystalline thin films: texture determination

Materials: Measurement of polycrystalline materials, nanomaterials, polycrystalline thin films, etc.

Parameter: Texture

Scanning method: joint scanning of Chi axis and Phi axis

·Measurement of residual stress in thin films

Materials: Measurement of polycrystalline materials, nanomaterials, polycrystalline thin films, etc.

Parameter: Residual stress

Scanning method: 2Theta axis and Chi axis combined scanning

·Example of X-ray diffraction application

-Ultra thin High-K material

-Measurement of residual stress in thin films

Analysis software

The Jordan Valley analysis software package has over 30 years of experience and is widely used for X-ray characterization of structural features in thin film materials. Based on the analysis software package from Bede Scientific in the UK, Jordan Valley analysis software has a wide range of applicability and advantages in both research and industrial production fields, including high-resolution X-ray diffraction (HRXRD) and X-ray reflection (XRR) automated fitting software, general analysis software, mapping and analysis software, etc.

-JV RADS: A highly acclaimed and trusted software in the industrial production field, widely used for HRXRD data analysis of various epitaxial thin films grown on single crystal substrates.

-MDI JADE: It has powerful XRD data analysis capabilities, including reading, processing, and analyzing diffraction patterns, and can accurately perform phase identification analysis.

-JV REFS: A software used for analyzing X-ray reflection data. The software is easy to operate and has powerful functions, and is widely used in research and production fields.

-JV Contour: capable of drawing and displaying 2D or 3D mapping maps

-JV PeakSplit: Provides multiple functions for direct analysis of HRXRD and XRD data, graphical display of HRXRD or XRD measurement data, and fitting of peak shape characteristics.

For more data instances or detailed parameters, please feel free to contact our company for request.