With the TS2000-DP, MPI provides a multifunctional and cost-effective probe station for measuring high-power devices on wafers in the temperature range of 20 ° C to 300 ° C, with measurement capabilities up to 3 kV (three-axis)/10 kV (coaxial) and 600A (pulse).

product description

1. Designed specifically for various wafer production applications

DC-IV/DC-CV/Pulsed-IV applications

RF applications up to 67 GHz and 4-port setup

High power production applications up to 10 kV/600 A

IC design verification from room temperature to 300 ℃

2. Production reliability

Specially designed for 24/7 stable and reliable production testing

Integrated passive isolation platform

Optional active isolation base

Suitable for an ambient temperature of 300 ℃

3. Ergonomic design and selection

Easy front-end loading design for single crystal circles

The large probe station can support 12x DC or 4x DC+4x RF micro locators, or 4.5 "standard probe card fixtures

Characteristics and advantages

1. Probe cards and MicroPositioners

TS2000-DP provides up to 12 times higher voltage (up to 3 kV three-axis or 10 kV coaxial) or 4 times higher current (up to 400 A MicroPositioners)

Many single probes and specialized probe clamps are used for arc resistant high-power probe cards, making the system an ideal choice for measuring the characteristics of high-power devices

2. Anti arc technology

The system is equipped with ArcShield ™， To prevent any possible arcing between the chuck and probe plate

The anti arc probe card has the ability to apply high voltage around the DUT and prevent arc discharge between solder pads by using Paschen's law

Specially designed anti arc liquidTray ™ Simply place it on the surface of a high-power suction cup to suppress arcs. The wafer can be safely placed in a tray and immersed in liquid for high voltage testing without arc discharge

MPI chuck can reach up to 10 kV (coaxial) at 300 ° C

3. Instrument integration

TS2000-DP can be configured with multiple instrument connection packages, including necessary high voltage/high current probes and cable accessories for optimal connection with Keysight B15005 (3 kV or 10 kV) and other testing instruments, including integrated module selectors or Jishili 2600-PCT-XB, including integrated 8020 high-power interface panel

4. Software Suite SENTIO ®

The MPI automated engineering probe system is controlled by a unique and revolutionary multi touch operation SENTIO software suite - simple and intuitive operation saves a lot of training time. The Scroll, Zoom, Move commands mimic modern intelligent mobile devices, allowing everyone to become an expert in just a few minutes

For RF applications, there is no need to switch to another software platform - the MPI RF calibration software program QAlibria is fully integrated with SENTIO - easy to use by following a single operating concept approach