VMB valve box product introduction:

VMB valve distribution box is a valve box with embedded multiple branches to achieve high-purity gas or liquid diversion.

VMB enables high-purity raw materials to be distributed from a single source to multiple applications. For each usage point, pressure can be individually regulated to meet the needs of different applications simultaneously. It can also provide blowing and vacuum pumping functions, so operators can safely maintain without dangerous gas leaks

Every part of VMB. In addition, during the operation of the equipment, it is possible to blow or vacuum a certain branch without affecting the gas supply to other branches.

Introduction to semi-automatic VMB valve box:

Semi automatic distribution box (VMB): By using PLC control and pressure sensors, pneumatic valves and other devices installed on the equipment, the safe and effective operation of the equipment is achieved. The safety interlock function of its internal PLC program design and the reasonable selection and layout of high-purity valve components not only meet the requirements of semiconductor

The continuous supply and high purity requirements of high-purity media in the production process of the body technology also ensure the normal production of the factory and the personal safety of employees.

Applicable gases: flammable, corrosive, toxic gases such as SiH4, NF3, NH3, N2O, HCl, etc.
Applicable industries: Semiconductor、TFT、Sun Solar、LED， Research institutes, university laboratories, etc.

Basic panel configuration:

Imported manual isolation valve
Pneumatic diaphragm valve
Imported pressure sensor
Blow pressure gauge
One way valve
Pressure reducer
filter

Panel optional configuration

Vacuum generator
Test port valve