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Plasma ashing machine PR200/300/301
Plasma ashing machine PR200/300/301
Product details
A small desktop plasma cleaning machine for surface modification and cleaning of samples
purpose
Functional groups on the surface of polymer materials enhance adhesion and cohesion. Through oxidation reaction, - OH is generated on the surface Functional groups such as C=O and - COOH (influenced by trace amounts of water and carbon dioxide). In nitrogen plasma, nitrogen atoms are absorbed on the surface, generating functional groups such as - NH2.
Silicon wafer etching.
Surface modification of materials (metals, polymers, films, ceramics, etc.).
Asbestos pretreatment (membrane filtration ashing).
From electronic devices to the biochemical market.
Low temperature ashing (for polymer materials, coal, food, etc.).
Use glass and PDMS board to paste PDMS chips.
● Surface organic matter removal
characteristic
High performance output type with RF of 200 W (PR200).
Due to its compact size, the desktop computer can be installed in very small positions.
● Synchronization, automatic tuning, simple operation (PR200).
● Plasma reactor (ashing equipment) (PR200).
● Synchronization and automatic tuning (PR200).
Reaction chamber
[Example] Pre treatment of asbestos analysis
Specifications
purpose
Functional groups on the surface of polymer materials enhance adhesion and cohesion. Through oxidation reaction, - OH is generated on the surface Functional groups such as C=O and - COOH (influenced by trace amounts of water and carbon dioxide). In nitrogen plasma, nitrogen atoms are absorbed on the surface, generating functional groups such as - NH2.
Silicon wafer etching.
Surface modification of materials (metals, polymers, films, ceramics, etc.).
Asbestos pretreatment (membrane filtration ashing).
From electronic devices to the biochemical market.
Low temperature ashing (for polymer materials, coal, food, etc.).
Use glass and PDMS board to paste PDMS chips.
● Surface organic matter removal
characteristic
High performance output type with RF of 200 W (PR200).
Due to its compact size, the desktop computer can be installed in very small positions.
● Synchronization, automatic tuning, simple operation (PR200).
● Plasma reactor (ashing equipment) (PR200).
● Synchronization and automatic tuning (PR200).
Reaction chamber
[Example] Pre treatment of asbestos analysis
Specifications
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model |
PR200 |
PR300 |
PR301 |
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pattern |
DP mode, bucket type |
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Control Department |
High frequency output |
Max300W |
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frequency |
13.56MHz |
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Homology method |
Manual 2-axis synchronization mode |
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Reaction Department |
Reaction chamber |
Heat resistant glass Φ 100 × 160mm |
Ultra hard glass Φ 64 × 160mm × 3 rooms |
Heat resistant glass Φ 118 × 160mm |
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Reactive gas |
1. System (oxygen) flowmeter |
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control |
Manual closed valve |
Automatic pressure reducing and automatic sealing valve |
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Piping material |
Stainless steel, PTFE, copper, copper alloy |
Stainless steel, Teflon |
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External dimensions |
W350×D400×H500mm |
W438×D520×H556mm |
W438×D520×H630mm |
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weight |
About 10kg |
About 36kg |
About 34kg |
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Power Supply |
AC100V 15A |
AC100V 7A |
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