Suitable for use with halogen series reactive and corrosive special gases such as HBr and HCl. The gas contact part is made of Hastelloy nickel alloy and is a pressure transmitter specifically designed for corrosive special gases

In the production line of semiconductor equipment, halogen reactive and corrosive special gases such as HBr and HCl are widely used. These corrosive gases will adsorb and react with a small amount of moisture on the inner surface of stainless steel used in gas supply pipelines, pressure sensors, gas filters, etc., forming corrosion products. This substance is the cause of semiconductor process pollution caused by the generation of particles. Therefore, we adopted Hastelloy nickel alloy, which has much better corrosion resistance than stainless steel SUS316L ® Develop the PC-600 series pressure sensor for corrosive gases.

● High corrosion resistance

Corresponding to halogen reactive and corrosive special gases such as HBr and HCl, the gas contact part is made of Hastelloy nickel alloy, which has much higher corrosion resistance than stainless steel SUS316L ®， And it has undergone electrolytic grinding treatment, fully exerting its excellent corrosion resistance ability.

● High precision, high reliability
The maximum deviation from the optimal fitting line caused by linearity, hysteresis, and repeatability is ± 0.25%, demonstrating high precision and reliability.

● Wide measurement range
The pressure range of the gauge is from 0 to 172.4KPA (1.76KGf/cm2) to 20684KPa (210KGf/cm2), and the absolute pressure range is from 0 to 2586torr.

● Long service life
Each measurement range has passed one million cycles of durability testing.

● Output
The output can be selected from 4-20mA or 0-5V, and can be connected to various digital panel instruments and programmable logic controllers.

Specifications:

※ Optional: The output reference for gauge pressure type can be vacuum (-100KPa). (To be specified when ordering)