This product is a MEMS laser deflection mirror based on microelectromechanical technology, also known as a MEMS laser beam scanner. Widely used in data acquisition, projection, and various other applications. Micro mechanical beam scanning mirrors can provide products with small size, large scanning angle, and high scanning frequency, suitable for various small-sized products. This product is a single micro mechanical laser beam scanning deflection mirror. In addition, this series of products also includes 1D micro mechanical laser beam deflectors (one-dimensional micro electromechanical laser beam scanning deflectors) and 2D micro mechanical laser beam deflectors (two-dimensional micro electromechanical laser scanning deflectors).

Micro mechanical scanning mirrors offer a high degree of miniaturization, high scan frequencies, high mechanical robustness and the potential for low cost manufacturing at high volumes. MEMS scanners are very promising especially for small and portable systems.

The specifications of this micro mechanical laser beam deflector (micro electromechanical laser beam scanning deflection mirror) are as follows:
MEMS Scanner
Scanner type Electrostatic resonant 1D
Scanning frequency 500 Hz … 50 kHz (≥ 200 Hz on request)
Optical scan angle (FOV) Depending on scanner, optical scan angle up to 80°
(mechanical scan angle ±20°) supported
Active mirror diameter 1 … 4 mm
Active mirror surface Aluminum, reflectivity 88 ... 90% in visible
wavelength range (400 … 700 nm)

Scan Head
Substrates with available technologies Ceramic (standard), glass or PCB on request
Sealing Dust-proof
Optical interface Dome with anti-reflective coating;
option: plane window on request
Mirror position control Optical, integrated in scan head, signal processing on driving electronics board
Electrical interface Flexible flat cable connected to sensor system
Module footprint 16 × 23 mm²
Working temperature 0 … 45 °C (extended temperature range on request)

Driving Electronics Board
Dimensions 77 × 46 mm²
Supply voltage 5 V DC
Internally generated driving
voltage for scanner 15 V … 200 V, max. 3 mA
Operating modes of thescanner control amplitude-controlled (above 8° scanning angle) or voltage-controlled