MDA-400M Lithography Machine
Lithography machine, also known as mask alignment exposure machine, exposure system, lithography system, lithography machine, UV exposure machine, etc;
MIDAS is a leading global semiconductor equipment supplier, dedicated to the research and production of mask alignment lithography machines and homogenizers for many years, and widely used in the fields of semiconductors, microelectronics, biological devices, and nanotechnology; This company is one of the earliest companies in the world to commercialize lithography machines, with strong technical research and development capabilities and equipment production capabilities; And its equipment has been adopted by many famous enterprises, research centers, institutes, and universities; With excellent technology, exquisite craftsmanship, and excellent service, we have won the favor of users.

Origin: MIDAS Company in South Korea, the only company capable of producing patterned sapphire substrate (PSS) lithography machines with high cost-effectiveness
model: MDA-400M
Manufacturer link: http://www.midas-china.com.cn/

MDA-400M

Easy to operate and install, handling substrates of various sizes, PLC control with touch screen panel

• Fully manual type

Mask template size up to 5 inches

The substrate size is a 4-inch circular shape

Uniform beam size 4.25 * 4.25 inches

• Light source: UV lamp, 350 W

• Beam wavelength 350-450 nm

Beam uniformity<± 3%

365 nm intensity~25 mW/㎠

• Manual alignment

• Alignment accuracy of 1 um

• Operating modes: soft, hard, vacuum contact and proximity

• Process resolutionone um@1 um PRThickness, with vacuum contacts

• Size (mm) 1080 (width) * 1060 (depth) * 1580 (height)