Leica High Vacuum Coating Instrument Leica EM ACE600
Leica EM ACE600 is a high vacuum coating instrument, with a diaphragm pump and a turbo molecular pump as the vacuum pump, an oil-free vacuum system, and a vacuum degree of up to 2 × 10-6mbar. The coating is delicate and uniform. Built in quartz film thickness detector, which can accurately control the coating thickness. Fully automatic computer control, automatically completes vacuuming, coating, and venting
Leica EM ACE600 is a high vacuum coating instrument, with a diaphragm pump and a turbo molecular pump as the vacuum pump, an oil-free vacuum system, and a vacuum degree of up to 2 × 10-6mbar. The coating is delicate and uniform. Built in quartz film thickness detector, which can accurately control the coating thickness. Fully automatic computer control, automatically completes the entire process of vacuuming, coating, and venting, with one click operation. Adopting the most popular touch screen control currently available, it is simple and convenient.
The instrument can be equipped with ion sputtering metal film to meet the requirements of high-resolution field emission scanning electron microscopy (FESEM). Optional carbon wire evaporation coated carbon film for X-ray energy spectrum and spectral analysis, or TEM copper mesh coated carbon film. Electron beam evaporation can also be chosen for coating, obtaining extremely delicate metal and carbon films that can be used for special purposes such as DNA projection.
Main technical parameters:
·Optional ion sputtering mode, carbon wire evaporation carbon plating mode, carbon rod (thermal resistance) evaporation mode, electron beam evaporation mode, dual sputtering mode, sputtering carbon wire mode, sputtering carbon rod mode, sputtering
Electron beam mode, dual electron beam mode, compatible with EM VCT100 cryogenic transport system, optional glow discharge (for grid surface hydrophilicity)
·Patent design pulse type carbon filament evaporation method, which can accurately control the thickness of carbon film
·Built in quartz film thickness detector, precise control of coating thickness, accuracy up to 0.1nm
·Fully automatic program control, automatically completing processes such as vacuuming, coating, and venting
·Touch screen control, simple and convenient
·Adopting diaphragm pump+turbo molecular pump, oil-free vacuum system, vacuum degree 2 × 10-6mbar
·Sputtering current: adjustable from 0-150mA
·Square sample chamber patented design, sample chamber size: 200mm (width) x 150mm (depth) x 195mm (height)
·The sample stage has built-in rotation, and the working distance adjustment range is 30mm-100mm