technical parameter
Product model |
Accura III-2010A |
Accura III-3020A |
Accura III-4030A |
Accura III-5030A |
Dimensions (W * D * H) |
570*370*790mm |
700*500*900mm |
860*650*1120mm |
860*700*1120mm |
X*Y*Ztrip |
200*100*100mm |
300*200*150mm |
400*300*150mm |
500*300*150mm |
Table size |
350*270mm |
500*350mm |
600*450mm |
650*450mm |
machine weight |
100kg |
180kg |
350kg |
360Kg |
Table-board weight |
20kg |
25kg |
25kg |
25Kg |
Reproducibility |
< 0.005mm |
< 0.005mm |
< 0.005mm |
< 0.005mm |
Grating ruler analytical power |
0.0005mm |
0.0005mm |
0.0005mm |
0.0005mm |
Indication accuracy |
3+L/200μm |
3+L/200μm |
3+L/200μm |
3+L/200μm |
Magnification factor |
20x-120x |
20x-120x |
20x-120x |
20x-120x |
CCD |
Color 1/3 "high-resolution 520TV cable |
Color 1/3 "high-resolution 520TV cable |
Color 1/3 "high-resolution 520TV cable |
Color 1/3 "high-resolution 520TV cable |
Drive mode |
CNC(Fully automatic) |
CNC(Fully automatic) |
CNC(Fully automatic) |
CNC(Fully automatic) |