In many ultra pure gas applications, such as the semiconductor industry, residual moisture in the gas is crucial for the normal operation of the process treatment. Continuous tracking and measurement of moisture has always been a challenge, requiring the use of complex humidity analyzers or expensive analytical techniques. However, Michell Instruments has currently introduced a simple, economical, and quite effective solution to the market for online measurement of dew point values, with a lower limit as low as an astonishing -120 ° C (equivalent to less than 1 ppb)V）. Pura transmitter is the first low-priced transmitter suitable for the semiconductor manufacturing industry and ultra pure gas applications, based on years of professional experience in impedance dew point sensor production and calibration by Micellar Instruments, combined with standard industrial materials and manufacturing processes. highlight Measurement lower limit -120 ° C dew point (1 ppb)V) Stable measurement with good repeatability Highly integrated sampling device Analog and digital outputs Easy installation VCR process interface Compact and compact design Display/alarm unit optional
technical indicators
sensor sensor type Micellar Ceramic Humidity Sensor range -Dew point of 120~-40 ° C (calibrated to -100~-40 ° C) precision ±1°C -40 ~ -60°C; ±2°C -61 ~ -100°C; ± 4 ° C-101~-120 ° C (estimated value) resolution 0.1°C -40 ~ -79.9°C; 1°C -80 ~ -100°C; 1 ~ 3°C -100 ~ -120°C pressure Minimum 10-9 torr; Maximum 24 MPa gas flow rate 1 ~ 5 Nl/min electrical power supply Usually 24 V DC, minimum 10 V~maximum 28 V, maximum current 25 mA output 4-20 mA output, the corresponding range can be adjusted by dedicated software, and the range can be adjusted from 1 to 80 ° C (provided as standard) Maximum load=100 Ω+50 Ω x (V supply-8) Output error status The standard output error message is as follows: 23 mA=sensor failure; 20 mA=exceeding the upper limit; 4 mA=Over limit mechanical properties Sensor sleeve Stainless steel, 0.1-0.2 Ra µ m electroplated internal polishing Gas connection port Premium or OEM model: ¼'m VCR interface Pura Sensor Type: Half'm VCR Interface Installation and Configuration Premium or OEM type: 120.00mm long, with end face sealing for air path ports No need to reserve pipeline gaps There are 2 M4 x 0.7, 7mm deep mounting holes on the base, with a horizontal and vertical spacing of 20 x 20mm diagonally opposite each other Pura Sensor type: suitable for use in user provided half 'VCR ports size Premium or OEM model: 120 x 35 x 150mm Pura Sensor 型: 132 x 35mm weight Premium or OEM model: 450g Pura Sensor 型: 180g packaging Pura: Double layered packaging, sealed with inert gas filling Pura OEM or Pura Sensor type: single-layer packaging All optional accessories: independent packaging and transportation The Sensor type comes with a protective cover on the sensing chip end for transportation and operation